Invention Grant
- Patent Title: Highly scaled tunnel FET with tight pitch and method to fabricate same
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Application No.: US15070501Application Date: 2016-03-15
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Publication No.: US09779995B2Publication Date: 2017-10-03
- Inventor: Karthik Balakrishnan , Kangguo Cheng , Pouya Hashemi , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Harrington & Smith
- Agent Louis J. Percello
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/8234 ; H01L29/66 ; H01L29/165 ; H01L29/78 ; H01L29/51 ; H01L21/306 ; H01L29/08 ; H01L29/167 ; H01L29/423 ; H01L27/088 ; H01L29/161 ; H01L29/45 ; H01L29/49 ; H01L21/84 ; H01L29/10 ; H01L21/02 ; H01L27/12

Abstract:
A structure includes a substrate and a tunnel field effect transistor (TFET). The TFET includes a source region disposed in the substrate having an overlying source contact, the source region containing first semiconductor material having a first doping type; a drain region disposed in the substrate having an overlying drain contact, the drain region containing second semiconductor material having a second, opposite doping type; and a gate structure that overlies a channel region between the source and the drain. The source region and the drain region are asymmetric with respect to one another such that one contains a larger volume of semiconductor material than the other one. A method is disclosed to fabricate a plurality of the TFETs using a plurality of spaced apart mandrels having spacers. A pair of the mandrels and the associated spacers is processed to form four adjacent TFETs without requiring intervening lithographic processes.
Public/Granted literature
- US20170084726A1 Highly Scaled Tunnel FET With Tight Pitch and Method to Fabricate Same Public/Granted day:2017-03-23
Information query
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