Invention Grant
- Patent Title: Methods of forming integrated circuit devices
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Application No.: US14969709Application Date: 2015-12-15
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Publication No.: US09780107B2Publication Date: 2017-10-03
- Inventor: Umberto M. Meotto , Giulio Albini , Paolo Tessariol , Paola Bacciaglia , Marcello Mariani
- Applicant: MICRON TECHNOLOGY, INC.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L27/11568 ; H01L27/11573 ; H01L29/66 ; H01L29/792 ; H01L21/02 ; H01L21/762 ; H01L29/06

Abstract:
Methods of forming integrated circuit devices containing memory cells over a first region of a semiconductor substrate and gate structures over a second region of the semiconductor substrate recessed from the first region. The methods include forming a metal that is common to both the memory cells and the gate structures.
Public/Granted literature
- US20160104716A1 METHODS OF FORMING INTEGRATED CIRCUIT DEVICES Public/Granted day:2016-04-14
Information query
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