Invention Grant
- Patent Title: Methods of forming a gate contact above an active region of a semiconductor device
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Application No.: US14731960Application Date: 2015-06-05
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Publication No.: US09780178B2Publication Date: 2017-10-03
- Inventor: Ruilong Xie , Andre Labonte , Andreas Knorr
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/423 ; H01L23/535 ; H01L29/06 ; H01L29/78 ; H01L21/28

Abstract:
One method disclosed herein includes, among other things, forming a gate contact opening in a layer of insulating material, wherein the gate contact opening is positioned at least partially vertically above a active region, the gate contact opening exposing a portion of at least a gate cap layer of a gate structure, performing at least one etching process to remove the gate cap layer and recess a sidewall spacer so as to thereby define a spacer cavity and expose at least an upper surface of a gate electrode within the gate contact opening, filling the spacer cavity with an insulating material while leaving the upper surface of the gate electrode exposed, and forming a conductive gate contact in the gate contact opening.
Public/Granted literature
- US20160359009A1 METHODS OF FORMING A GATE CONTACT ABOVE AN ACTIVE REGION OF A SEMICONDUCTOR DEVICE Public/Granted day:2016-12-08
Information query
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