Precision return actuator
Abstract:
A nanometer-scale precision actuator comprises a base, an intermediate structure, an output interface, and two linear elements producing a controllable extension in the same longitudinal direction, each between a first and a second end. A first of the two elements has a first end fixed onto the intermediate structure and a second end fixed onto the base, a second of the two elements has a first end fixed onto the intermediate structure and a second end fixed to the output interface. The base and the intermediate structure are positioned in such a manner that the controllable extension of the second element produces a displacement of the actuator in a first direction and the controllable extension of the first element produces a displacement of the actuator in a second direction, opposite to the first direction, with respect to the base.
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