Vibration driving device, apparatus equipped with vibration driving device, control device and control method for vibration actuator

    公开(公告)号:US11611294B2

    公开(公告)日:2023-03-21

    申请号:US17345792

    申请日:2021-06-11

    发明人: Hiromitsu Morita

    IPC分类号: H02N2/06 G02B21/24 G02B26/08

    摘要: A vibration driving device that improves controllability in low speed driving. The vibration driving device includes a vibration actuator that includes a vibrator that has an elastic member and an electro-mechanical energy conversion element, a contact member that contacts the vibrator, and a control device that controls drive of the vibration actuator. The control device includes a speed detection unit that detects speed information showing relative speed of the vibrator and the contact member, and an adjustment unit that decreases amplitude of vibration excited in the vibrator in a case where the speed detection unit detects that a state where the vibration actuator does not operate approximately and a state where the vibration actuator operates at a speed faster than a target driving speed occur alternately after starting to drive the vibration actuator.

    Actuator and light scanning apparatus

    公开(公告)号:US11598949B2

    公开(公告)日:2023-03-07

    申请号:US17201088

    申请日:2021-03-15

    申请人: Kensuke Yamada

    发明人: Kensuke Yamada

    摘要: An actuator including a beam configured to support an object to be driven, and a drive source to which a drive signal is input, wherein the drive signal includes a drive waveform in a shape of sawtooth waveform, a rising of the drive waveform in the shape of sawtooth waveform includes a first staircase waveform and a second staircase waveform continuing from the first staircase waveform, the first staircase waveform generates oscillation of a ringing suppressing waveform for suppressing a ringing waveform to be generated in the second staircase waveform, and the object to be driven is driven to swing in a direction of rotating around the predetermined axis by driving the drive source.

    Piezoelectric element drive circuit

    公开(公告)号:US11592017B2

    公开(公告)日:2023-02-28

    申请号:US17376553

    申请日:2021-07-15

    发明人: Kenjiro Okaguchi

    摘要: A piezoelectric element drive circuit includes a piezoelectric element driven at a predetermined frequency and having a resonant frequency of (2n+1) times the predetermined frequency (n is a predetermined natural number), and a drive voltage generator that has a first output terminal connected to a first terminal of the piezoelectric element and a second output terminal connected to a second terminal of the piezoelectric element. When the piezoelectric element is driven, a waveform of potential difference between the first output terminal and the second output terminal is a step wave which transitions while taking an intermediate potential. A time length for which the potential difference is the intermediate potential is around (t2−t1)/(2n+1) in a period of time from time t1 at which the potential difference falls to the intermediate potential to time t2 at which the potential difference falls to the intermediate potential subsequently.

    Identifying mechanical impedance of an electromagnetic load using least-mean-squares filter

    公开(公告)号:US11509292B2

    公开(公告)日:2022-11-22

    申请号:US16559238

    申请日:2019-09-03

    摘要: A method for identifying a mechanical impedance of an electromagnetic load may include generating a waveform signal for driving an electromagnetic load and, during driving of the electromagnetic load by the waveform signal or a signal derived therefrom, receiving a current signal representative of a current associated with the electromagnetic load and a back electromotive force signal representative of a back electromotive force associated with the electromagnetic load. The method may also include implementing an adaptive filter to identify parameters of the mechanical impedance of the electromagnetic load, wherein an input of a coefficient control for adapting coefficients of the adaptive filter is a first signal derived from the back electromotive force signal and a target of the coefficient control for adapting coefficients of the adaptive filter is a second signal derived from the current signal.

    ACTUATOR ASSEMBLIES COMPRISING PIEZO ACTUATORS OR ELECTROSTRICTIVE ACTUATORS

    公开(公告)号:US20220326627A1

    公开(公告)日:2022-10-13

    申请号:US17608760

    申请日:2020-05-12

    IPC分类号: G03F7/20 H02N2/02 H02N2/06

    摘要: An actuator assembly including a first piezo actuator and a second piezo actuator. The piezo actuator has a correction unit configured to determine an output voltage difference representing a difference between a voltage at the output terminal of the first piezo actuator and a voltage at the output terminal of the second piezo actuator, and a first power correction for correcting the first power signal and/or a second power correction for correcting the second power signal, based on the output voltage difference.

    SHORT-TRAVEL NANOSCALE MOTION STAGE AND METHOD FOR MEASURING THERMALLY-RELATED HYSTERESIS DATA

    公开(公告)号:US20220271688A1

    公开(公告)日:2022-08-25

    申请号:US17676888

    申请日:2022-02-22

    摘要: A short-travel nanoscale motion stage and a method for measuring thermally-related hysteresis data are provided. A stator unit of a left two-pole electromagnet and stator units of two inchworm motors are fixed on a right side surface of a left foundation frame, and an active unit of the left two-pole electromagnet and actives of the two inchworm motors are fixed on a left side surface of a stage moving component. An active unit of a right two-pole electromagnet is fixed on a right side surface of the stage moving component, while a stator unit of the right two-pole electromagnet is fixed on a left side surface of a right foundation frame. The stage moving component is fixedly mounted on a guide sleeve of an aerostatic guideway. Each of the stator units of the left and right two-pole electromagnets has an eddy current sensor and a hall sensor fixed therein.

    ACTUATOR
    8.
    发明申请
    ACTUATOR 有权

    公开(公告)号:US20220247329A1

    公开(公告)日:2022-08-04

    申请号:US17611815

    申请日:2020-05-15

    发明人: Burhanettin KOC

    摘要: An actuator in the form of a stack is described, wherein the stack includes multiple first pairs of layers of a polarized electromechanical material and multiple second pairs of layers of a polarized electromechanical material, and the first and second pairs of layers are disposed, one behind the other, wherein at each pair of layers on each of its terminal surfaces electrically conductive layers are disposed, and, between the layers of each pair of layers, an electrically conductive layer for connection to at least one connection electrode of a second polarity is disposed, and the polarization directions of the electromechanical material of the layers of each pair are aligned opposite to one another, and the directions of polarization of the material of the layers of each pair of layers are aligned perpendicular to the directions of polarization of the material of the layers of each adjacent pair of layers.

    INJECTOR AND CONTROL METHOD FOR AN ULTRASONIC MOTOR

    公开(公告)号:US20220200487A1

    公开(公告)日:2022-06-23

    申请号:US17654392

    申请日:2022-03-10

    摘要: Provided is an injector in which adhesion between a stator and a rotor of an ultrasonic motor can be released efficiently. An injector (1) which injects a chemical liquid includes: an ultrasonic motor unit (3) including an ultrasonic motor (31); a drive mechanism (4) to be driven by the ultrasonic motor unit (3) so as to feed the chemical liquid when the ultrasonic motor (31) rotates forwardly; and a control device (5) which controls the ultrasonic motor (31) of the ultrasonic motor unit (3). The ultrasonic motor (31) includes a stator (32) and a rotor (33), and the control device (5) controls the ultrasonic motor (31) to alternately repeat forward rotation and reverse rotation so that adhesion between the stator (32) and the rotor (33) is released.

    CONTROL DEVICE FOR VIBRATION-TYPE ACTUATOR, VIBRATION-TYPE DRIVE DEVICE INCLUDING VIBRATION-TYPE ACTUATOR AND CONTROL DEVICE, AND ELECTRONIC APPARATUS USING MACHINE LEARNING

    公开(公告)号:US20220131480A1

    公开(公告)日:2022-04-28

    申请号:US17510064

    申请日:2021-10-25

    发明人: Jun Sumioka

    IPC分类号: H02N2/06 H02N2/02

    摘要: A control device for a vibration-type actuator includes a control unit including first and second output units. The first output unit includes a first learned model subjected to machine learning in such a way as to output a first control amount for causing the contact body to relatively move with respect to the vibrator. The second output unit includes a second learned model subjected to machine learning in such a way as to output a second control amount, which is data of the same data format as that of the first control amount. The control unit updates parameters of the first learned model and parameters of the second learned model based on a control deviation, which is a difference between the first control amount and the second control amount output within the same sampling period as that of the first control amount.