- 专利标题: Complementary tunneling FET devices and method for forming the same
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申请号: US15036058申请日: 2013-12-26
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公开(公告)号: US09786769B2公开(公告)日: 2017-10-10
- 发明人: Aleksandar Aleksov
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt P.C.
- 国际申请: PCT/US2013/077873 WO 20131226
- 国际公布: WO2015/099744 WO 20150702
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/739 ; H01L29/267 ; H01L29/423 ; H01L51/05 ; H01L29/24 ; H01L29/786 ; H01L51/00 ; H01L29/06 ; H01L21/8258 ; H01L29/78
摘要:
Described is an apparatus forming complementary tunneling field effect transistors (TFETs) using oxide and/or organic semiconductor material. One type of TFET comprises: a substrate; a doped first region, formed above the substrate, having p-type material selected from a group consisting of Group III-V, IV-IV, and IV of a periodic table; a doped second region, formed above the substrate, having transparent oxide n-type semiconductor material; and a gate stack coupled to the doped first and second regions. Another type of TFET comprises: a substrate; a doped first region, formed above the substrate, having p-type organic semiconductor material; a doped second region, formed above the substrate, having n-type oxide semiconductor material; and a gate stack coupled to the doped source and drain regions. In another example, TFET is made using organic only semiconductor materials for active regions.
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