- 专利标题: Magnetically drivable micromirror
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申请号: US13976301申请日: 2011-11-09
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公开(公告)号: US09791663B2公开(公告)日: 2017-10-17
- 发明人: Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
- 申请人: Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
- 申请人地址: DE Stuttgart
- 专利权人: ROBERT BOSCH GMBH
- 当前专利权人: ROBERT BOSCH GMBH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Norton Rose Fulbright US LLP
- 代理商 Gerard Messina
- 优先权: DE102010064218 20101227
- 国际申请: PCT/EP2011/069698 WO 20111109
- 国际公布: WO2012/089387 WO 20120705
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; G02B26/10 ; G02B26/12 ; G02B7/182
摘要:
A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.
公开/授权文献
- US20140092458A1 MAGNETICALLY DRIVABLE MICROMIRROR 公开/授权日:2014-04-03
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