Invention Grant
- Patent Title: Structures and devices including germanium-tin films and methods of forming same
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Application No.: US15203642Application Date: 2016-07-06
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Publication No.: US09793115B2Publication Date: 2017-10-17
- Inventor: John Tolle
- Applicant: ASM IP HOLDING, B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/02 ; H01L31/0745 ; H01L31/18 ; H01L29/165 ; C30B25/18 ; C30B29/52 ; H01L29/161
Abstract:
Methods of forming germanium-tin films using germane as a precursor are disclosed. Exemplary methods include growing films including germanium and tin in an epitaxial chemical vapor deposition reactor, wherein a ratio of a tin precursor to germane is less than 0.1. Also disclosed are structures and devices including germanium-tin films formed using the methods described herein.
Public/Granted literature
- US20160314967A1 STRUCTURES AND DEVICES INCLUDING GERMANIUM-TIN FILMS AND METHODS OF FORMING SAME Public/Granted day:2016-10-27
Information query
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