- Patent Title: Magnetoresistive stack/structure and method of manufacturing same
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Application No.: US15013950Application Date: 2016-02-02
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Publication No.: US09793470B2Publication Date: 2017-10-17
- Inventor: Sarin A. Deshpande , Kerry Joseph Nagel , Chaitanya Mudivarthi , Sanjeev Aggarwal
- Applicant: Everspin Technologies, Inc.
- Applicant Address: US AZ Chandler
- Assignee: Everspin Technologies, Inc.
- Current Assignee: Everspin Technologies, Inc.
- Current Assignee Address: US AZ Chandler
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L43/12 ; H01L43/08

Abstract:
A method of manufacturing a magnetoresistive stack/structure comprising etching through a second magnetic region to (i) provide sidewalls of the second magnetic region and (ii) expose a surface of a dielectric layer; depositing a first encapsulation layer on the sidewalls of the second magnetic region and over the dielectric layer; etching (i) the first encapsulation layer which is disposed over the exposed surface of the dielectric layer and (ii) re-deposited material disposed on the dielectric layer, wherein, thereafter a portion of the first encapsulation layer remains on the sidewalls of the second magnetic region. The method further includes depositing a second encapsulation layer: (i) on the first encapsulation layer disposed on the sidewalls of the second magnetic region and (ii) over the exposed surface of the dielectric layer; and etching the remaining layers of the stack/structure (via one or more etch processes).
Public/Granted literature
- US20160225981A1 Magnetoresistive Stack/Structure and Method of Manufacturing Same Public/Granted day:2016-08-04
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