- 专利标题: Radio-frequency loss reduction in photonic circuits
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申请号: US15130156申请日: 2016-04-15
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公开(公告)号: US09804475B1公开(公告)日: 2017-10-31
- 发明人: John Parker , Gregory Alan Fish , Brian R. Koch
- 申请人: John Parker , Gregory Alan Fish , Brian R. Koch
- 申请人地址: US CA Goleta
- 专利权人: Aurrion, Inc.
- 当前专利权人: Aurrion, Inc.
- 当前专利权人地址: US CA Goleta
- 代理机构: Schwegman Lundberg & Woessner, P.A.
- 主分类号: G02F1/035
- IPC分类号: G02F1/035 ; G02F1/225 ; H01L27/146 ; H01L31/18
摘要:
In photonic integrated circuits implemented in silicon-on-insulator substrates, non-conductive channels formed, in accordance with various embodiments, in the silicon device layer and/or the silicon handle of the substrate in regions underneath radio-frequency transmission lines of photonic devices can provide breaks in parasitic conductive layers of the substrate, thereby reducing radio-frequency substrate losses.
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