Invention Grant
- Patent Title: Plasma processing method
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Application No.: US15408733Application Date: 2017-01-18
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Publication No.: US09805917B2Publication Date: 2017-10-31
- Inventor: Koichi Nagami
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2016-008143 20160119
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
In a plasma processing method, first processes and second processes are performed alternately. In each first process, a first gas is supplied into a processing vessel from a gas supply system, and a first high frequency power is supplied from a first high frequency power supply. In each second process, the first high frequency power is supplied from the first high frequency power supply continuously from a first process which is performed just before the corresponding second process. In each second process, a gas switching signal for switching the gas from the first gas to the second gas is applied to the gas supply system. Further, a supply of a second high frequency power is begun by a second high frequency power supply when a parameter such as a load impedance exceeds a threshold value after the gas switching signal is applied to the gas supply system.
Public/Granted literature
- US20170207068A1 PLASMA PROCESSING METHOD Public/Granted day:2017-07-20
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