Invention Grant
- Patent Title: Strained finFET device fabrication
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Application No.: US14833350Application Date: 2015-08-24
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Publication No.: US09805992B2Publication Date: 2017-10-31
- Inventor: Bruce B. Doris , Hong He , Sivananda K. Kanakasabapathy , Gauri Karve , Fee Li Lie , Stuart A. Sieg
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/84 ; H01L27/12 ; H01L29/78 ; H01L29/66 ; H01L21/02 ; H01L21/265 ; H01L21/306 ; H01L21/762 ; H01L29/06 ; H01L29/16 ; H01L29/161 ; H01L29/165

Abstract:
A method for forming a fin on a substrate comprises patterning and etching a layer of a first semiconductor material to define a strained fin, depositing a layer of a second semiconductor material over the fin, the second semiconductor material operative to maintain the a strain in the strained fin, etching to remove a portion of the second semiconductor material to define a cavity that exposes a portion of the fin, etching to remove the exposed portion of the fin such that the fin is divided into a first segment and a second segment, and depositing an insulator material in the cavity, the insulator material contacting the first segment of the fin and the second segment of the fin.
Public/Granted literature
- US20170053838A1 STRAINED FINFET DEVICE FABRICATION Public/Granted day:2017-02-23
Information query
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