Invention Grant
- Patent Title: Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same
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Application No.: US14618251Application Date: 2015-02-10
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Publication No.: US09809448B2Publication Date: 2017-11-07
- Inventor: Martin Lim , Fariborz Assaderaghi
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H01L29/82
- IPC: H01L29/82 ; B81B7/00 ; G01L23/12 ; H04R19/00 ; B81B7/02

Abstract:
A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a substrate having a first surface and a second surface and wherein the first surface is exposed to an environment outside the MEMS device; and a MEMS microphone disposed at a first location on the second surface of the substrate and having a diaphragm positioned such that acoustic waves received at the MEMS microphone are incident on the diaphragm. The MEMS device also includes: a first integrated circuit disposed at a second location of the substrate, wherein the first integrated circuit is electrically coupled to the MEMS microphone; and a MEMS measurement device at a third location, wherein the MEMS measurement device comprises a motion sensor and a pressure sensor.
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Information query
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