Invention Grant
- Patent Title: Positive resist composition and method of pattern formation with the same
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Application No.: US15359973Application Date: 2016-11-23
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Publication No.: US09835945B2Publication Date: 2017-12-05
- Inventor: Hiromi Kobayashi , Shinichi Kanna , Haruki Inabe
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2005-215412 20050726; JP2005-356714 20051209; JP2006-7762 20060116; JP2006-107727 20060410; JP2006-198897 20060721
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/004 ; G03F7/16 ; G03F7/38 ; G03F7/32 ; G03F7/40 ; G03F7/09

Abstract:
A positive resist composition comprising: (A) a resin which comes to have an enhanced solubility in an alkaline developing solution by an action of an acid; (B) a compound which generates an acid upon irradiation with actinic rays or a radiation; (C) a fluorine-containing compound containing at least one group selected from the groups (x) to (z); and (F) a solvent, and a method of pattern formation with the composition: (x) an alkali-soluble group; (y) a group which decomposes by an action of an alkaline developing solution to enhance a solubility in an alkaline developing solution; and (z) a group which decomposes by an action of an acid.
Public/Granted literature
- US20170123318A1 POSITIVE RESIST COMPOSITION AND METHOD OF PATTERN FORMATION WITH THE SAME Public/Granted day:2017-05-04
Information query
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