Invention Grant
- Patent Title: Flow-down determination method, flow-down determination apparatus and discharge apparatus
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Application No.: US15208085Application Date: 2016-07-12
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Publication No.: US09838575B2Publication Date: 2017-12-05
- Inventor: Hiroaki Kakuma
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2015-149633 20150729
- Main IPC: G06K9/00
- IPC: G06K9/00 ; H04N5/225 ; G01F1/708 ; G06T7/20 ; H01L21/67 ; G01P13/00 ; C03C15/00

Abstract:
Imaging is performed such that a flow-down path of the liquid from the nozzle arranged above a work to an upper surface of the work is included in an imaging field of view (Step S401). A total value of pixel values of pixels belonging to each pixel column composed of the pixels arranged in a line along a flow-down direction of the liquid in an evaluation region corresponding to the flow-down path out of an imaged image is calculated (Step S402-S403). Based on a change mode of the total value in an orthogonal direction orthogonal to the flow-down direction, presence or absence of the flow-down of the liquid is determined (Step S405-S407).
Public/Granted literature
- US20170028426A1 FLOW-DOWN DETERMINATION METHOD, FLOW-DOWN DETERMINATION APPARATUS AND DISCHARGE APPARATUS Public/Granted day:2017-02-02
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