- 专利标题: Magnetoelectric sensor and method for the production thereof
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申请号: US14427714申请日: 2013-10-07
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公开(公告)号: US09841472B2公开(公告)日: 2017-12-12
- 发明人: Andre Piorra , Eckhard Quandt
- 申请人: Christian-Albrechts-Universitaet zu Kiel
- 申请人地址: DE Kiel
- 专利权人: Christian-Albrechts-Universitaet zu Kiel
- 当前专利权人: Christian-Albrechts-Universitaet zu Kiel
- 当前专利权人地址: DE Kiel
- 代理机构: Patent Central LLC
- 代理商 Stephan A. Pendorf
- 优先权: EP12187606 20121008
- 国际申请: PCT/EP2013/070817 WO 20131007
- 国际公布: WO2014/056842 WO 20140417
- 主分类号: G01R19/00
- IPC分类号: G01R19/00 ; G01R33/09 ; H01L41/00 ; H01L41/047
摘要:
Magnetoelectric sensors that can be manufactured using known methods of thin film technology and output an ME voltage that is many times higher for a predetermined magnetic field than the known cantilever-beam sensor. The design that is termed separator ME sensor is characterized by the arrangement of a thick dielectric layer (14) between the ferroelectric (10) and the magnetostrictive phases (12), and by an electrode arrangement (18) applied on one side of the ferroelectric (10) and that is engineered to tap the ME voltage along the extent of the layer. Advantageously, it can be manufactured easily by coating conventional dielectric substrates (14) on the front and rear with one each of the functional layers (10, 12).
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