Invention Grant
- Patent Title: Power scalable nonlinear optical wavelength converter
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Application No.: US15197715Application Date: 2016-06-29
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Publication No.: US09841655B2Publication Date: 2017-12-12
- Inventor: Dirk Woll
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: G02F1/35
- IPC: G02F1/35 ; G02F1/355 ; G02B27/09 ; H01S3/00

Abstract:
A system includes a nonlinear crystal positioned such that a focus of a laser beam is outside the nonlinear crystal in at least one plane perpendicular to a beam propagation direction of the laser beam. The nonlinear crystal is disposed in a crystal mount assembly. A laser beam may be directed at the nonlinear crystal for wavelength conversion. The system may be used as a deep-UV wavelength converter.
Public/Granted literature
- US20170003572A1 POWER-SCALABLE NONLINEAR OPTICAL WAVELENGTH CONVERTER Public/Granted day:2017-01-05
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