- 专利标题: Micromechanical component having a diaphragm
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申请号: US13761558申请日: 2013-02-07
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公开(公告)号: US09850120B2公开(公告)日: 2017-12-26
- 发明人: Uwe Schiller , Volkmar Senz , Jochen Franz , Helmut Grutzeck , Michaela Mitschke
- 申请人: Robert Bosch GmbH
- 申请人地址: DE Stuttgart
- 专利权人: ROBERT BOSCH GMBH
- 当前专利权人: ROBERT BOSCH GMBH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Norton Rose Fulbright US LLP
- 代理商 Gerard Messina
- 优先权: DE102012202035 20120210
- 主分类号: H01L29/10
- IPC分类号: H01L29/10 ; B81B3/00 ; G01L9/00 ; G01L19/06 ; B81C1/00 ; H04R29/00
摘要:
Measures are described with the aid of which not only a rupture, but also cracks may be detected in the diaphragm structure of a micromechanical component with the aid of circuit means integrated into the diaphragm structure. At least some circuit elements are integrated for this purpose into the bottom side of the diaphragm, i.e., into a diaphragm area directly adjoining the cavern below the diaphragm.
公开/授权文献
- US20130234140A1 MICROMECHANICAL COMPONENT HAVING A DIAPHRAGM 公开/授权日:2013-09-12
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