- 专利标题: Compact, configurable power supply for energizing ozone-producing cells
-
申请号: US15056330申请日: 2016-02-29
-
公开(公告)号: US09865426B2公开(公告)日: 2018-01-09
- 发明人: Ken Tran , Feng Tian , Xing Chen , Franklin Lee
- 申请人: MKS Instruments, Inc.
- 申请人地址: US MA Andover
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Andover
- 代理机构: Burns & Levinson, LLP
- 代理商 Joseph M. Maraia; Steven M. Mills
- 主分类号: C01B13/11
- IPC分类号: C01B13/11 ; H01J37/248
摘要:
Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.
公开/授权文献
信息查询