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    Compact, configurable power supply for energizing ozone-producing cells
    1.
    发明授权
    Compact, configurable power supply for energizing ozone-producing cells 有权

    公开(公告)号：US09865426B2

    公开(公告)日：2018-01-09

    申请号：US15056330

    申请日：2016-02-29

    Applicant: MKS Instruments, Inc.

    Inventor： Ken Tran ,  Feng Tian ,  Xing Chen ,  Franklin Lee

    IPC: C01B13/11 ,  H01J37/248

    CPC classification number: H01J37/248 ,  C01B13/115 ,  C01B2201/90

    Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

    COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS
    3.
    发明申请
    COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS 有权

    公开(公告)号：US20160181063A1

    公开(公告)日：2016-06-23

    申请号：US15056330

    申请日：2016-02-29

    Applicant: MKS Instruments, Inc.

    Inventor： Ken Tran ,  Feng Tian ,  Xing Chen ,  Franklin Lee

    IPC: H01J37/248 ,  C01B13/11

    CPC classification number: H01J37/248 ,  C01B13/115 ,  C01B2201/90

    Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

    Method and system for controlling radio frequency power
    4.
    发明授权
    Method and system for controlling radio frequency power 有权
    控制射频功率的方法和系统

    公开(公告)号：US08912835B2

    公开(公告)日：2014-12-16

    申请号：US14151321

    申请日：2014-01-09

    Applicant: MKS Instruments, Inc.

    Inventor： Siddarth Nagarkatti ,  Feng Tian ,  David Lam ,  Abdul Rashid ,  Souheil Benzerrouk ,  Ilya Bystryak ,  David Menzer ,  Jack J. Schuss ,  Jesse E. Ambrosina

    IPC: H03K3/00 ,  H03K5/01

    CPC classification number: H03K5/01 ,  H03F3/189 ,  H03F3/217 ,  H03F2200/105 ,  H03F2200/375 ,  H03F2200/387 ,  H03G3/3047

    Abstract: A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.

    Abstract translation: 一种用于控制脉冲功率的方法，包括从功率放大器测量第一功率脉冲以获得数据。 该方法还包括产生第一信号以调整输出功率的第二脉冲，第一信号与数据相关，以最小化功率设定点与第二脉冲的基本稳定部分之间的功率差。 该方法还包括产生第二信号以调整传递功率的第二脉冲，第二信号与数据相关，以最小化第二脉冲的峰值与第二脉冲的基本上稳定的部分之间的幅度差异。

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