With the increase in the speed of operation of a device, it is necessary to perform washing to drying for a wide range of a probe in a short time. A probe, a washing nozzle which ejects a washing liquid, a vacuum nozzle which sucks air, a washing tank, which is connected to the washing nozzle and the vacuum nozzle, and in which washing and drying of the probe is performed by ejecting the washing liquid from the washing nozzle and then sucking air by the vacuum nozzle, a waste liquid flow path, which is connected to the washing tank, and into which the washing liquid is discharged, and a shielding member 100 which shields a flow path between the washing tank and the waste liquid flow path after the washing liquid is ejected from the washing nozzle.