Invention Grant
- Patent Title: Integrated circuit device and method of fabricating the same
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Application No.: US15356821Application Date: 2016-11-21
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Publication No.: US09875938B2Publication Date: 2018-01-23
- Inventor: Yongkuk Jeong , Gi-Gwan Park
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2016-0076615 20160620
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/8234 ; H01L21/311 ; H01L27/088 ; H01L27/11

Abstract:
An integrated circuit device includes: a first fin-type active region in a first area of a substrate, the first fin-type active region having a first recess filled with a first source/drain region; a first device isolation layer covering both lower sidewalls of the first fin-type active region; a second fin-type active region in a second area of the substrate, the second fin-type active region having a second recess filled with a second source/drain region; a second device isolation layer covering both lower sidewalls of the second fin-type active region; and a fin insulating spacer on the first device isolation layer, the fin insulating spacer covering a sidewall of the first fin-type active region under the first source/drain region.
Public/Granted literature
- US20170365522A1 INTEGRATED CIRCUIT DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2017-12-21
Information query
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