Invention Grant
- Patent Title: Copper indium gallium selenide (CIGS) thin films with composition controlled by co-sputtering
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Application No.: US14549778Application Date: 2014-11-21
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Publication No.: US09881774B2Publication Date: 2018-01-30
- Inventor: Jesse A. Frantz , Jasbinder S. Sanghera , Robel Y. Bekele , Vinh Q. Nguyen , Ishwar D. Aggarwal , Allan J. Bruce , Michael Cyrus , Sergey V. Frolov
- Applicant: Jesse A. Frantz , Jasbinder S. Sanghera , Robel Y. Bekele , Vinh Q. Nguyen , Ishwar D. Aggarwal , Allan J. Bruce , Michael Cyrus , Sergey V. Frolov
- Applicant Address: US DC Washington US NJ South Plainfield
- Assignee: The United States of America, as represented by the Secretary of the Navy,Sunlight Photonics Inc.
- Current Assignee: The United States of America, as represented by the Secretary of the Navy,Sunlight Photonics Inc.
- Current Assignee Address: US DC Washington US NJ South Plainfield
- Agency: US Naval Research Laboratory
- Agent Dawn C. Russell
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34 ; C23C14/08 ; C23C14/06 ; H01L21/02 ; H01L31/0368 ; H01L31/0392 ; H01L31/18

Abstract:
A method and apparatus for forming a thin film of a copper indium gallium selenide (CIGS)-type material are disclosed. The method includes providing first and second targets in a common sputtering chamber. The first target includes a source of CIGS material, such as an approximately stoichiometric polycrystalline CIGS material, and the second target includes a chalcogen, such as selenium, sulfur, tellurium, or a combination of these elements. The second target provides an excess of chalcogen in the chamber. This can compensate, at least in part, for the loss of chalcogen from the CIGS-source in the first target, resulting in a thin film with a controlled stoichiometry which provides effective light absorption when used in a solar cell.
Public/Granted literature
- US20150075620A1 COPPER INDIUM GALLIUM SELENIDE (CIGS) THIN FILMS WITH COMPOSITION CONTROLLED BY CO-SPUTTERING Public/Granted day:2015-03-19
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