Invention Grant
- Patent Title: Substrate for display device and method for manufacturing display device
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Application No.: US14688339Application Date: 2015-04-16
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Publication No.: US09881938B2Publication Date: 2018-01-30
- Inventor: Takaaki Kamimura , Noriyuki Hirata
- Applicant: Japan Display Inc.
- Applicant Address: JP Minato-ku
- Assignee: Japan Display Inc.
- Current Assignee: Japan Display Inc.
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-086351 20140418
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/66 ; H01L21/3213 ; H01L21/02 ; H01L21/311

Abstract:
According to one embodiment, a substrate for display device includes an insulating substrate and a conductive film formed on at least one main surface of the insulating substrate. As to the substrate in an etching process in which a fluoric acid solution containing 10% or more hydrogen fluoride is used, a first etching rate of the conductive film is substantially the same as a second etching rate of the insulating substrate, or the first etching rate is greater than the second etching rate.
Public/Granted literature
- US20150303220A1 SUBSTRATE FOR DISPLAY DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE Public/Granted day:2015-10-22
Information query
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