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公开(公告)号：US10269597B2
公开(公告)日：2019-04-23
申请号：US15599788
申请日：2017-05-19
Applicant: Japan Display Inc.
Inventor： Takaaki Ishikawa , Takaaki Kamimura , Noriyuki Hirata
IPC: H01L21/67 , H01L51/50 , H01L51/00 , H01L21/677 , G05B19/418 , H01L51/56
Abstract: Disclosed is a manufacturing apparatus of a light-emitting element. The manufacturing apparatus includes: a main transporting route including a first transfer device and a second transfer device connected to each other through a first transporting chamber; a sub-transporting route extending in a direction intersecting the main transporting route, the sub-transporting route including: a second transporting chamber connected to the first transfer device or the second transfer device; and a delivery chamber connected to the second transporting chamber; and a plurality of treatment chambers connected to the delivery chamber. A region to which the first transfer device, the second transfer device, the first transporting chamber, and the second transporting chamber are connected is under a continuous vacuum environment.
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公开(公告)号：US20190051867A1
公开(公告)日：2019-02-14
申请号：US16162528
申请日：2018-10-17
Applicant: Japan Display Inc.
Inventor： Takaaki ISHIKAWA , Takaaki Kamimura , Noriyuki Hirata
CPC classification number: H01L51/56 , C23C14/24 , C23C14/568 , H01L21/67173 , H01L21/67184 , H01L21/67745 , H01L21/67748 , H01L21/67751 , H01L27/3246 , H01L51/0008 , H01L51/0011 , H01L51/0021
Abstract: Disclosed is a manufacturing apparatus of a light-emitting element including: a main transporting route extending in a first direction, the main transporting route comprising first and second transfer devices connected through a first transporting chamber; a sub-transporting route extending in a second direction intersecting the first direction, the sub-transporting route comprising a second transporting chamber connected to the first or second transfer device and a delivery chamber connected to the second transfer chamber; and a plurality of first treatment chambers connected to the delivery chamber. The main transporting route is configured to transfer a substrate to be treated in a horizontal state, and one of the plurality of treatment chambers is configured to hold the substrate in a vertical state during treatment.
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公开(公告)号：US20190305259A1
公开(公告)日：2019-10-03
申请号：US16447478
申请日：2019-06-20
Applicant: Japan Display Inc.
Inventor： Takaaki ISHIKAWA , Takaaki Kamimura , Noriyuki Hirata
Abstract: Disclosed is a manufacturing apparatus of a light-emitting element including: a main transporting route extending in a first direction, the main transporting route comprising first and second transfer devices connected through a first transporting chamber; a sub-transporting route extending in a second direction intersecting the first direction, the sub-transporting route comprising a second transporting chamber connected to the first or second transfer device and a delivery chamber connected to the second transfer chamber; and a plurality of first treatment chambers connected to the delivery chamber. The main transporting route is configured to transfer a substrate to be treated in a horizontal state, and one of the plurality of treatment chambers is configured to hold the substrate in a vertical state during treatment.
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公开(公告)号：US09881938B2
公开(公告)日：2018-01-30
申请号：US14688339
申请日：2015-04-16
Applicant: Japan Display Inc.
Inventor： Takaaki Kamimura , Noriyuki Hirata
IPC: H01L27/12 , H01L29/66 , H01L21/3213 , H01L21/02 , H01L21/311
CPC classification number: H01L27/1218 , H01L21/02063 , H01L21/31111 , H01L21/32134 , H01L27/1259 , H01L29/66757
Abstract: According to one embodiment, a substrate for display device includes an insulating substrate and a conductive film formed on at least one main surface of the insulating substrate. As to the substrate in an etching process in which a fluoric acid solution containing 10% or more hydrogen fluoride is used, a first etching rate of the conductive film is substantially the same as a second etching rate of the insulating substrate, or the first etching rate is greater than the second etching rate.
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公开(公告)号：US09666836B2
公开(公告)日：2017-05-30
申请号：US14708597
申请日：2015-05-11
Applicant: Japan Display Inc.
Inventor： Takaaki Kamimura , Noriyuki Hirata
CPC classification number: H01L51/529 , H01L27/3248 , H01L51/5271 , H01L51/56 , H01L2227/323
Abstract: According to one embodiment, an organic EL device includes an insulating substrate including a first main surface and a second main surface, a switching element formed on the insulating substrate at the first main surface side, a first electrode electrically connected to the switching element, a second electrode opposed to the first electrode, an organic luminescent layer disposed between the first electrode and the second electrode, a reflective plate disposed between the insulating substrate and the first electrode, and a conductive film covering the second main surface of the insulating substrate.
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Patent Agency Ranking
公开(公告)号：US10367174B2
公开(公告)日：2019-07-30
申请号：US16162528
申请日：2018-10-17
Applicant: Japan Display Inc.
Inventor： Takaaki Ishikawa , Takaaki Kamimura , Noriyuki Hirata
Abstract: Disclosed is a manufacturing apparatus of a light-emitting element including: a main transporting route extending in a first direction, the main transporting route comprising first and second transfer devices connected through a first transporting chamber; a sub-transporting route extending in a second direction intersecting the first direction, the sub-transporting route comprising a second transporting chamber connected to the first or second transfer device and a delivery chamber connected to the second transfer chamber; and a plurality of first treatment chambers connected to the delivery chamber. The main transporting route is configured to transfer a substrate to be treated in a horizontal state, and one of the plurality of treatment chambers is configured to hold the substrate in a vertical state during treatment.
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公开(公告)号：US10164218B2
公开(公告)日：2018-12-25
申请号：US15644923
申请日：2017-07-10
Applicant: Japan Display Inc.
Inventor： Takaaki Ishikawa , Takaaki Kamimura , Noriyuki Hirata
Abstract: Disclosed is a manufacturing apparatus of a light-emitting element including: a main transporting route extending in a first direction, the main transporting route comprising first and second transfer devices connected through a first transporting chamber; a sub-transporting route extending in a second direction intersecting the first direction, the sub-transporting route comprising a second transporting chamber connected to the first or second transfer device and a delivery chamber connected to the second transfer chamber; and a plurality of first treatment chambers connected to the delivery chamber. The main transporting route is configured to transfer a substrate to be treated in a horizontal state, and one of the plurality of treatment chambers is configured to hold the substrate in a vertical state during treatment.
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公开(公告)号：US20150333112A1
公开(公告)日：2015-11-19
申请号：US14708597
申请日：2015-05-11
Applicant: Japan Display Inc.
Inventor： Takaaki KAMIMURA , Noriyuki Hirata
CPC classification number: H01L51/529 , H01L27/3248 , H01L51/5271 , H01L51/56 , H01L2227/323
Abstract: According to one embodiment, an organic EL device includes an insulating substrate including a first main surface and a second main surface, a switching element formed on the insulating substrate at the first main surface side, a first electrode electrically connected to the switching element, a second electrode opposed to the first electrode, an organic luminescent layer disposed between the first electrode and the second electrode, a reflective plate disposed between the insulating substrate and the first electrode, and a conductive film covering the second main surface of the insulating substrate.
Abstract translation: 根据一个实施例，有机EL器件包括：绝缘基板，包括第一主表面和第二主表面;开关元件，形成在第一主表面侧的绝缘基板上;第一电极，电连接到开关元件; 与第一电极相对的第二电极，设置在第一电极和第二电极之间的有机发光层，设置在绝缘基板和第一电极之间的反射板，以及覆盖绝缘基板的第二主表面的导电膜。
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公开(公告)号：US10418423B2
公开(公告)日：2019-09-17
申请号：US15498203
申请日：2017-04-26
Applicant: Japan Display Inc.
Inventor： Takaaki Kamimura , Noriyuki Hirata
Abstract: According to one embodiment, an organic EL device includes an insulating substrate including a first main surface and a second main surface, a switching element formed on the insulating substrate at the first main surface side, a first electrode electrically connected to the switching element, a second electrode opposed to the first electrode, an organic luminescent layer disposed between the first electrode and the second electrode, a reflective plate disposed between the insulating substrate and the first electrode, and a conductive film covering the second main surface of the insulating substrate.
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公开(公告)号：US20170358469A1
公开(公告)日：2017-12-14
申请号：US15599788
申请日：2017-05-19
Applicant: Japan Display Inc.
Inventor： Takaaki ISHIKAWA , Takaaki Kamimura , Noriyuki Hirata
IPC: H01L21/67
CPC classification number: H01L21/67155 , G05B19/41865 , H01L21/67121 , H01L21/67132 , H01L21/67138 , H01L21/67144 , H01L21/67161 , H01L21/67173 , H01L21/67184 , H01L21/67207 , H01L21/67236 , H01L21/67745 , H01L51/0002 , H01L51/5012 , H01L51/504 , H01L51/5068 , H01L51/5084 , H01L51/56 , H01L2224/80
Abstract: Disclosed is a manufacturing apparatus of a light-emitting element. The manufacturing apparatus includes: a main transporting route including a first transfer device and a second transfer device connected to each other through a first transporting chamber; a sub-transporting route extending in a direction intersecting the main transporting route, the sub-transporting route including: a second transporting chamber connected to the first transfer device or the second transfer device; and a delivery chamber connected to the second transporting chamber; and a plurality of treatment chambers connected to the delivery chamber. A region to which the first transfer device, the second transfer device, the first transporting chamber, and the second transporting chamber are connected is under a continuous vacuum environment.
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