Invention Grant
- Patent Title: Narrow band laser apparatus
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Application No.: US15486323Application Date: 2017-04-13
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Publication No.: US09882343B2Publication Date: 2018-01-30
- Inventor: Masato Moriya , Takeshi Ohta , Keisuke Ishida , Takashi Kusama
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2014/081660 20141128
- Main IPC: H01S3/13
- IPC: H01S3/13 ; H01S3/081 ; H01S3/082 ; H01S3/08 ; H01S3/137 ; G01J3/28 ; H01S3/134 ; H01S3/225

Abstract:
A narrow band laser apparatus may include: a laser resonator; a pair of discharge electrodes; a power supply; a first wavelength measurement device configured to output a first measurement result; a second wavelength measurement device configured to output a second measurement result; and a control unit. The control unit calibrates the first measurement result, based on a difference between the second measurement result derived when the control unit controls the power supply to apply a pulsed voltage to the pair of discharge electrodes with a first repetition frequency and the second measurement result derived when the control unit controls the power supply to apply the pulsed voltage to the pair of discharge electrodes with a second repetition frequency, the second repetition frequency being higher than the first repetition frequency.
Public/Granted literature
- US20170222391A1 NARROW BAND LASER APPARATUS Public/Granted day:2017-08-03
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