Invention Grant
- Patent Title: Gallium and nitrogen containing laser device having confinement region
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Application No.: US15356302Application Date: 2016-11-18
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Publication No.: US09882353B2Publication Date: 2018-01-30
- Inventor: Po Shan Hsu , Melvin McLaurin , James W. Raring , Alexander Sztein , Benyamin Buller
- Applicant: Soraa Laser Diode, Inc.
- Applicant Address: US CA Goleta
- Assignee: Soraa Laser Diode, Inc.
- Current Assignee: Soraa Laser Diode, Inc.
- Current Assignee Address: US CA Goleta
- Agency: Kilpatrick Townsend & Stockton
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01S5/343 ; H01S5/02 ; H01S5/042 ; H01S5/22

Abstract:
A method for fabricating a laser diode device includes providing a gallium and nitrogen containing substrate member having a surface region, forming a patterned dielectric material overlying the surface region to expose a portion of the surface region within a vicinity of an recessed region of the patterned dielectric material and maintaining an upper portion of the patterned dielectric material overlying covered portions of the surface region, and performing a lateral epitaxial growth overlying the exposed portion of the surface region to fill the recessed region and causing a thickness of the lateral epitaxial growth to be formed overlying the upper portion of the patterned dielectric material. The method also includes forming an n-type gallium and nitrogen containing material, forming an active region, and forming a p-type gallium and nitrogen containing material. The method further includes forming a waveguide structure in the p-type gallium and nitrogen containing material.
Public/Granted literature
- US20170077677A1 GALLIUM AND NITROGEN CONTAINING LASER DEVICE HAVING CONFINEMENT REGION Public/Granted day:2017-03-16
Information query
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