Invention Grant
- Patent Title: Method and system for controlling convective flow in a light-sustained plasma
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Application No.: US15207136Application Date: 2016-07-11
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Publication No.: US09887076B2Publication Date: 2018-02-06
- Inventor: Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Kenneth P. Gross , David W. Shortt , Wei Zhao , Anant Chimmalgi , Jincheng Wang
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J65/00
- IPC: H01J65/00 ; H01J65/04 ; H01J61/28 ; H01J61/52 ; H05H1/24

Abstract:
A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a bulb-less gas containment structure, and a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb-less gas containment structure. Further, the plasma is generated within a concave region of the collector element, where the collector element includes an opening through the collector element for propagating a portion of a plume of the plasma from a first region of the bulb-less gas containment structure to a second region of the bulb-less gas containment structure, wherein the first region of the bulb-less gas containment structure and the second region of the bulb-less gas containment structure are at least partially separated by a surface of the collector element.
Public/Granted literature
- US20160322211A1 Method and System for Controlling Convective Flow in a Light-Sustained Plasma Public/Granted day:2016-11-03
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