- 专利标题: Semiconductor memory device and method for manufacturing same
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申请号: US15412396申请日: 2017-01-23
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公开(公告)号: US09892930B1公开(公告)日: 2018-02-13
- 发明人: Keiichi Sawa , Shinji Mori , Masayuki Tanaka , Katsuyuki Kitamoto
- 申请人: Toshiba Memory Corporation
- 申请人地址: JP Minato-ku
- 专利权人: TOSHIBA MEMORY CORPORATION
- 当前专利权人: TOSHIBA MEMORY CORPORATION
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L21/28 ; H01L27/1157 ; H01L27/11582 ; H01L23/522 ; H01L23/528
摘要:
A semiconductor memory device includes a first electrode layer; a second electrode layer provided above the first electrode layer; a first insulating oxide layer provided between the first and second electrode layers; a semiconductor layer extending through the first electrode layer, the first insulating oxide layer and the second electrode layer that are stacked in the first direction; and a second insulating oxide layer extending in the first direction between the semiconductor layer and the first insulating oxide layer, the second insulating oxide layer being in contact with the first insulating oxide layer. At least one of the first insulating oxide layer and the second insulating oxide layer includes nitrogen atoms. The nitrogen atoms are distributed around an interface between the first insulating oxide layer and the second insulating oxide layer, or distributed in the vicinity of the interface.
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