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US09893100B2 Semiconductor optical device integrating photodiode with optical waveguide and method of forming the same 有权

Semiconductor optical device integrating photodiode with optical waveguide and method of forming the same
摘要：
A semiconductor optical device that integrates photodiodes (PDs) and optical waveguides coupling with the PDs and a method of forming the semiconductor optical device are disclosed. The optical waveguides in a portion in the lower cladding layer thereof provides a modified layer that forms a conduction barrier of the lower cladding layer. The modified layer is formed by converting the conduction type thereof or implanting protons therein. The modified layer prevents the electrical coupling between PDs through the waveguides.
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