Invention Grant
- Patent Title: CMOS ultrasonic transducers and related apparatus and methods
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Application No.: US15349223Application Date: 2016-11-11
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Publication No.: US09895718B2Publication Date: 2018-02-20
- Inventor: Jonathan M. Rothberg , Keith G. Fife , Tyler S. Ralston , Gregory L. Charvat , Nevada J. Sanchez
- Applicant: Butterfly Network, Inc.
- Applicant Address: US CT Guilford
- Assignee: Butterfly Network, Inc.
- Current Assignee: Butterfly Network, Inc.
- Current Assignee Address: US CT Guilford
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: B06B1/00
- IPC: B06B1/00 ; B06B1/02 ; B81B3/00 ; B81C1/00 ; G10K11/18 ; G10K9/12
Abstract:
CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.
Public/Granted literature
- US20170056926A1 CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS Public/Granted day:2017-03-02
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