Invention Grant
- Patent Title: Structured illumination device and structured illumination microscope device
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Application No.: US14996717Application Date: 2016-01-15
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Publication No.: US09897790B2Publication Date: 2018-02-20
- Inventor: Hiroaki Nakayama , Yumiko Ouchi
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2013-148730 20130717
- Main IPC: F21V9/16
- IPC: F21V9/16 ; G02B21/06 ; G01N21/64 ; G02B21/00 ; G02B21/36 ; G02B27/58 ; G02B21/16

Abstract:
A structured illumination device includes: a diffraction unit that diffracts light beams of a plurality of wavelengths that are emitted simultaneously or sequentially by a light source into a plurality of diffracted beams; and an optical system that forms interference fringes on a surface of a sample using the plurality of diffracted beams diffracted by the diffraction unit, the optical system including a first optical system and a second optical system that focuses the plurality of diffracted beams at positions on or near a pupil plane of the first optical system, and a magnification characteristic dY(λ) of the second optical system satisfying the condition of (fo·nw−afλ/P)≦dY(λ)≦(fo·NA−afλ/P), where a=1 (for M=1, 2) or a=2 (for M=3).
Public/Granted literature
- US20160131885A1 STRUCTURED ILLUMINATION DEVICE AND STRUCTURED ILLUMINATION MICROSCOPE DEVICE Public/Granted day:2016-05-12
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