Invention Grant
- Patent Title: System and method for imaging a sample with an electron beam with a filtered energy spread
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Application No.: US14826007Application Date: 2015-08-13
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Publication No.: US09905391B2Publication Date: 2018-02-27
- Inventor: Xinrong Jiang
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J1/50
- IPC: H01J1/50 ; H01J37/05

Abstract:
A selectively configurable system for directing an electron beam with a limited energy spread to a sample includes an electron source to generate an electron beam having an energy spread including one or more energies, an aperture having an on-axis opening and an off-axis opening, a first assembly of one or more electron lenses with selectively configurable focal powers positioned to collect the beam from the source and direct the beam to the aperture, a second assembly of one or more selectively configurable electron lenses positioned to collect the beam, a sample stage, and an electron inspection sub-system including electron optics positioned to direct the beam onto one or more samples. The first assembly includes an off-axis electron lens for interacting with the beam at an off-axis position and introducing spatial dispersion to the beam when configured with a nonzero focal power, thus filtering the energy spread.
Public/Granted literature
- US20160322190A1 System and Method for Imaging a Sample with an Electron Beam with a Filtered Energy Spread Public/Granted day:2016-11-03
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