Invention Grant
- Patent Title: Substrate transfer mechanisms
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Application No.: US14965228Application Date: 2015-12-10
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Publication No.: US09905454B2Publication Date: 2018-02-27
- Inventor: Masato Ishii , Mehmet Tugrul Samir , Shu-Kwan Lau , Jeffrey Tobin
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/687 ; C23C16/458 ; C30B25/12 ; H01L21/67 ; H01L21/677 ; C30B35/00
Abstract:
In one embodiment, a substrate support assembly includes a susceptor for supporting a substrate, and a supporting transfer mechanism coupled to the susceptor, the supporting transfer mechanism having a surface for supporting a peripheral edge of the substrate, the supporting transfer mechanism being movable relative to an upper surface of the susceptor.
Public/Granted literature
- US20160204019A1 SUBSTRATE TRANSFER MECHANISMS Public/Granted day:2016-07-14
Information query
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