A semiconductor device having a first load terminal, a second load terminal and a semiconductor body is presented. The semiconductor body comprises an active region configured to conduct a load current between the first load terminal and the second load terminal and a junction termination region surrounding the active region. The semiconductor body includes a drift layer arranged within both the active region and the junction termination region and having dopants of a first conductivity type at a drift layer dopant concentration of equal to or less than 1014 cm−3; a body zone arranged in the active region and having dopants of a second conductivity type complementary to the first conductivity type and isolating the drift layer from the first load terminal; a guard zone arranged in the junction termination region and having dopants of the second conductivity type and being configured to extend a depletion region formed by a transition between the drift layer and the body zone; a field stop zone arranged adjacent to the guard zone, the field stop zone having dopants of the first conductivity type at a field stop zone dopant concentration that is higher than the drift layer dopant concentration by a factor of at least 2; a low doped zone arranged adjacent to the field stop zone, the low doped zone having dopants of the first conductivity type at a dopant concentration that is lower than the drift layer dopant concentration by a factor of at least 1.5, wherein the body zone, the guard zone, the field stop zone and the low doped zone are arranged in the semiconductor body such that they exhibit a common depth range (DR) of at least 1 μm along a vertical extension direction (Z).