Processes for fabricating compact touch sensors for touch sensitive devices are disclosed. A process can include providing a touch sensor structure having a substrate, a first layer disposed on the substrate, and a second layer disposed on the first layer. The second layer can have an ablation fluence value that is lower than an ablation fluence value of the first layer. The process can include patterning the second layer with a laser emitting energy having a fluence value greater than or equal to the ablation fluence value of the second layer and less than the ablation fluence value of the first layer. The process can further include etching at least a portion of the first layer that was exposed during the patterning of the second layer. At least a portion of the second layer can then be removed by etching or laser ablation.