Invention Grant
- Patent Title: Semiconductor devices and methods of fabricating the same
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Application No.: US15359724Application Date: 2016-11-23
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Publication No.: US09911644B2Publication Date: 2018-03-06
- Inventor: Wookyung You , Jongmin Baek , Sanghoon Ahn , Sangho Rha , Naein Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2014-0058402 20140515
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/02 ; H01L21/311 ; H01L23/522 ; H01L23/532

Abstract:
The present disclosure describes semiconductor devices and methods of fabricating the same. The method includes forming an interlayer insulating layer on a substrate and forming conductive patterns in the interlayer insulating layer. A pore density of an upper portion of the interlayer insulating layer is higher than that of a lower portion of the interlayer insulating layer, and a pore density of an intermediate portion of the interlayer insulating layer gradually increases toward the upper portion of the interlayer insulating layer. An air gap is provided between the conductive patterns.
Public/Granted literature
- US20170076975A1 SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME Public/Granted day:2017-03-16
Information query
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