Invention Grant
- Patent Title: Methods of forming a through-substrate-via (TSV) and a metallization layer after formation of a semiconductor device
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Application No.: US15228317Application Date: 2016-08-04
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Publication No.: US09917009B2Publication Date: 2018-03-13
- Inventor: Himani Suhag Kamineni , Vimal Kumar Kamineni , Daniel Smith , Maxwell Lippitt
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/768 ; H01L29/417 ; H01L29/423 ; H01L23/522 ; H01L23/532 ; H01L29/66 ; H01L21/306

Abstract:
One illustrative method disclosed includes, among other things, forming a semiconductor device above a semiconducting substrate, forming a device level contact to the semiconductor device and, after forming the device level contact, performing at least one common process operation so as to form a through-substrate-via (TSV) in a trench in the substrate, a TSV contact structure that is conductively coupled to the TSV and a conductive metallization element that is conductively coupled to the device level contact.
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Information query
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