发明授权
- 专利标题: Methods for preventing plasma un-confinement events in a plasma processing chamber
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申请号: US12820020申请日: 2010-06-21
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公开(公告)号: US09928995B2公开(公告)日: 2018-03-27
- 发明人: Andreas Fischer , Rajinder Dhindsa
- 申请人: Andreas Fischer , Rajinder Dhindsa
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Martine Penilla Group, LLP
- 主分类号: B23P6/00
- IPC分类号: B23P6/00 ; H01J37/32
摘要:
A method for configuring a plasma processing chamber for preventing a plasma un-confinement event during processing of a substrate from occurring outside of a confined plasma sustaining region is provided. The confined plasma sustaining region is defined by a set of confinement rings surrounding a bottom portion of an electrode is provided. The method includes determining a worst-case Debye length for a plasma generated in the plasma processing chamber during the processing. The method also includes performing at least one of adjusting gaps between any pair of adjacent confinement rings and adding at least one additional confinement ring to ensure that a gap between the any pair of adjacent confinement rings is less than the worst-case Debye length.
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