Invention Grant
- Patent Title: Semiconductor device having a discontinued part between a first insulating film and a second insulating film
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Application No.: US15150597Application Date: 2016-05-10
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Publication No.: US09929042B2Publication Date: 2018-03-27
- Inventor: Yoshikazu Tsunemine , Takayuki Igarashi
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Koutou-ku, Tokyo
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Koutou-ku, Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2015-121024 20150616
- Main IPC: H01L27/32
- IPC: H01L27/32 ; H01L21/768 ; H01L23/532 ; H01L23/522

Abstract:
A semiconductor device, in which an increase in the size of a product can be suppressed and a withstand voltage between wiring layers can be improved, and a manufacturing method thereof are provided. A discontinued part, in which the interface between an interlayer insulating film and a passivation film is discontinued, is formed between a first wiring layer and a second wiring layer that are adjacent to each other with a space therebetween. Both the interlayer insulating film and the passivation film face an air gap in the discontinued part.
Public/Granted literature
- US20160372419A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2016-12-22
Information query
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