Invention Grant
- Patent Title: Using inter-tier vias in integrated circuits
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Application No.: US15188544Application Date: 2016-06-21
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Publication No.: US09929149B2Publication Date: 2018-03-27
- Inventor: Saurabh Pijuskumar Sinha , Robert Campbell Aitken , Brian Tracy Cline , Gregory Munson Yeric , Kyungwook Chang
- Applicant: ARM Limited
- Applicant Address: GB Cambridge
- Assignee: ARM Limited
- Current Assignee: ARM Limited
- Current Assignee Address: GB Cambridge
- Agency: Pramudji Law Group PLLC
- Agent Ari Pramudji
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L23/528 ; H01L23/522 ; H01L23/00 ; H01L23/48

Abstract:
Various implementations described herein may be directed to using inter-tier vias (IVs) in integrated circuits (ICs). In one implementation, a three-dimensional (3D) IC may include a plurality of tiers disposed on a substrate layer, where the tiers may include a first tier having a first active device layer electrically coupled to first interconnect layers, and may also include a second tier having a second active device layer electrically coupled to a second interconnect layer, where the first interconnect layers include an uppermost layer that is least proximate to the first active device layer. The 3D IC may further include IVs to electrically couple the second interconnect layer and the uppermost layer. The uppermost layer may be electrically coupled to a power source at peripheral locations of the first tier, thereby electrically coupling the power source to the first active device layer and to the second active device layer.
Public/Granted literature
- US20170365600A1 Using Inter-Tier Vias in Integrated Circuits Public/Granted day:2017-12-21
Information query
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