Invention Grant
- Patent Title: Integrated circuit and method for manufacturing thereof
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Application No.: US15232833Application Date: 2016-08-10
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Publication No.: US09929164B2Publication Date: 2018-03-27
- Inventor: Chao-Sheng Cheng
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN201610528411 20160706
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L27/11521 ; H01L29/66 ; H01L21/306 ; H01L21/28 ; H01L23/528

Abstract:
A method for manufacturing an integrated circuit includes following steps. A substrate including a memory region and a core region is provided. At least two semiconductor word lines, two memory cells in between the two semiconductor word lines, and a semiconductor gate in between the two memory cells are formed in the memory region. A transistor device including a dummy gate is formed in the core region, and a height of the dummy gate is larger than a height of the semiconductor word lines. A protecting layer is formed on the semiconductor word lines, the memory cells, the semiconductor gate and the transistor device. A portion of the protecting layer is removed to expose the dummy gate and followed be removing the dummy gate to form a gate trench in the transistor device. Then a metal gate is formed in the gate trench.
Public/Granted literature
- US20180012899A1 INTEGRATED CIRCUIT AND METHOD FOR MANUFACTURING THEREOF Public/Granted day:2018-01-11
Information query
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