Invention Grant
- Patent Title: Unit pixel of image sensor, image sensor including the same and method of manufacturing image sensor
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Application No.: US14660570Application Date: 2015-03-17
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Publication No.: US09929204B2Publication Date: 2018-03-27
- Inventor: Yong-Chan Kim , Seung-Sik Kim , Eun-Sub Shim , Moo-Sup Lim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2014-0029839 20140313; KR10-2014-0035348 20140326; KR10-2014-0046109 20140417
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L27/148 ; H04N5/355

Abstract:
Provided are a unit pixel, an image sensor including the same, a portable electronic device including the same, and a method of manufacturing the same. The method of manufacturing includes: forming a photoelectric conversion region in a substrate; forming, in the substrate, a first floating diffusion region spaced apart from the photoelectric conversion region of the substrate, and a second floating diffusion region spaced apart from the first floating diffusion region; forming a first recess spaced apart from the first floating diffusion region and the second floating diffusion region by removing a portion of the substrate from a first surface of the substrate; filling the first recess to form a dual conversion gain (DCG) gate that extends perpendicularly or substantially perpendicularly from the first surface of the substrate; and forming a conductive layer to fill an inside of the first recess.
Public/Granted literature
- US20160035784A9 UNIT PIXEL OF IMAGE SENSOR, IMAGE SENSOR INCLUDING THE SAME AND METHOD OF MANUFACTURING IMAGE SENSOR Public/Granted day:2016-02-04
Information query
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