Invention Grant
- Patent Title: Method for obtaining patterns in a layer
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Application No.: US15538564Application Date: 2015-12-22
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Publication No.: US09934973B2Publication Date: 2018-04-03
- Inventor: Stefan Landis , Nicolas Posseme , Sebastien Barnola , Thibaut David , Lamia Nouri
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1463145 20141222
- International Application: PCT/EP2015/081057 WO 20151222
- International Announcement: WO2016/102605 WO 20160630
- Main IPC: H01L21/266
- IPC: H01L21/266 ; C23C14/48 ; C23C14/04 ; H01L21/3065 ; H01L21/306 ; B81C1/00 ; H01L33/00 ; H01L33/22 ; H01L31/18 ; H01L31/0392 ; G03F7/00

Abstract:
The invention relates in particular to a method for producing subsequent patterns in an underlying layer (120), the method comprising at least one step of producing prior patterns in a carbon imprintable layer (110) on top of the underlying layer (120), the production of the prior patterns involving nanoimprinting of the imprintable layer (110) and leave in place a continuous layer formed by the imprintable layer (110) and covering the underlying layer (120), characterized in that it comprises the following step: at least one step of modifying the underlying layer (120) via ion implantation (421) in the underlying layer (120), the implantation (421) being carried out through the imprintable layer (110) comprising the subsequent patterns, the parameters of the implantation (421) being chosen in such a way as to form, in the underlying layer (120), implanted zones (122) and non-implanted zones, the non-Implanted zones defining the subsequent patterns and having a geometry that is dependent on the prior patterns.
Public/Granted literature
- US20170372904A1 METHOD FOR OBTAINING PATTERNS IN A LAYER Public/Granted day:2017-12-28
Information query
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