Invention Grant
- Patent Title: Optical inspection device
-
Application No.: US15102725Application Date: 2014-11-11
-
Publication No.: US09939387B2Publication Date: 2018-04-10
- Inventor: Tsutomu Okamoto , Emi Mizuno , Yoshinori Tarumoto
- Applicant: Ishida Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: Ishida Co., Ltd.
- Current Assignee: Ishida Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Studebaker & Brackett PC
- Priority: JP2013-258319 20131213
- International Application: PCT/JP2014/079865 WO 20141111
- International Announcement: WO2015/087653 WO 20150618
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/59 ; G01N21/90 ; G01N21/94 ; G01N21/95 ; G01N21/84 ; G01N21/89

Abstract:
An optical inspection apparatus 1 includes a light radiation unit 11 configured to radiate light to an article 50, a light detection unit 12 configured to detect transmitted light of the light radiated to the article 50, and a support unit 13 configured to support the light radiation unit 11 and the light detection unit 12 in a cantilever manner. An inspection region of the article 50 by the light is exposed to an ambient atmosphere.
Public/Granted literature
- US20170023488A1 OPTICAL INSPECTION DEVICE Public/Granted day:2017-01-26
Information query