Optical inspection device
Abstract:
An optical inspection apparatus 1 includes a light radiation unit 11 configured to radiate light to an article 50, a light detection unit 12 configured to detect transmitted light of the light radiated to the article 50, and a support unit 13 configured to support the light radiation unit 11 and the light detection unit 12 in a cantilever manner. An inspection region of the article 50 by the light is exposed to an ambient atmosphere.
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