公开(公告)号：US09939387B2

公开(公告)日：2018-04-10

申请号：US15102725

申请日：2014-11-11

Applicant: Ishida Co., Ltd.

Inventor： Tsutomu Okamoto ,  Emi Mizuno ,  Yoshinori Tarumoto

IPC: G01N21/88 ,  G01N21/59 ,  G01N21/90 ,  G01N21/94 ,  G01N21/95 ,  G01N21/84 ,  G01N21/89

CPC classification number: G01N21/8806 ,  G01N21/59 ,  G01N21/8901 ,  G01N21/90 ,  G01N21/94 ,  G01N21/95 ,  G01N2021/845 ,  G01N2201/062

Abstract: An optical inspection apparatus 1 includes a light radiation unit 11 configured to radiate light to an article 50, a light detection unit 12 configured to detect transmitted light of the light radiated to the article 50, and a support unit 13 configured to support the light radiation unit 11 and the light detection unit 12 in a cantilever manner. An inspection region of the article 50 by the light is exposed to an ambient atmosphere.

公开(公告)号：US20170023488A1

公开(公告)日：2017-01-26

申请号：US15102725

申请日：2014-11-11

Applicant: Ishida Co., Ltd.

Inventor： Tsutomu Okamoto ,  Emi Mizuno ,  Yoshinori Tarumoto

IPC: G01N21/88 ,  G01N21/59 ,  G01N21/95 ,  G01N21/90 ,  G01N21/94

CPC classification number: G01N21/8806 ,  G01N21/59 ,  G01N21/8901 ,  G01N21/90 ,  G01N21/94 ,  G01N21/95 ,  G01N2021/845 ,  G01N2201/062

Abstract: An optical inspection apparatus 1 includes a light radiation unit 11 configured to radiate light to an article 50, a light detection unit 12 configured to detect transmitted light of the light radiated to the article 50, and a support unit 13 configured to support the light radiation unit 11 and the light detection unit 12 in a cantilever manner. An inspection region of the article 50 by the light is exposed to an ambient atmosphere.

Abstract translation: 光学检查装置1包括被配置为向物品50照射光的光辐射单元11，被配置为检测被辐射到物品50的光的透射光的光检测单元12以及被配置为支撑光辐射的支撑单元13 单元11和光检测单元12以悬臂方式。 物品50的光的检查区域暴露于环境气氛。