Invention Grant
- Patent Title: Silicon electro-optical modulator
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Application No.: US14298859Application Date: 2014-06-06
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Publication No.: US09939666B2Publication Date: 2018-04-10
- Inventor: Long Chen
- Applicant: ACACIA COMMUNICATIONS INC.
- Applicant Address: US MA Maynard
- Assignee: Acacia Communications, Inc.
- Current Assignee: Acacia Communications, Inc.
- Current Assignee Address: US MA Maynard
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G02F1/025
- IPC: G02F1/025 ; G02B6/134 ; G02F1/015

Abstract:
Disclosed are designs and methods of fabrication of silicon carrier-depletion based electro-optical modulators having doping configurations that produce modulators exhibiting desirable modulation efficiency, optical absorption loss and bandwidth characteristics. The disclosed method of fabrication of a modulator having such doping configurations utilizes counter doping to create narrow regions of relatively high doping levels near a waveguide center.
Public/Granted literature
- US09671628B2 Silicon electro-optical modulator Public/Granted day:2017-06-06
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