Mechanisms for refractive index tuning semiconductor photonic devices

    公开(公告)号:US11175451B2

    公开(公告)日:2021-11-16

    申请号:US16733167

    申请日:2020-01-02

    Abstract: Embodiments include apparatuses, methods, and systems including a semiconductor photonic device having a waveguide disposed above a substrate. The waveguide has a first section including amorphous silicon with a first refractive index, and a second section including crystalline silicon with a second refractive index different from the first refractive index. The semiconductor photonic device further includes a heat element at a vicinity of the first section of the waveguide. The heat element is arranged to generate heat to transform the amorphous silicon of the first section of the waveguide to partially or completely crystallized crystalline silicon with a third refractive index. The amorphous silicon in the first section may be formed with silicon lattice defects caused by an element implanted into the first section. Other embodiments may also be described and claimed.

    Manufacturing a graded index profile for waveguide display applications

    公开(公告)号:US11009662B2

    公开(公告)日:2021-05-18

    申请号:US15695466

    申请日:2017-09-05

    Abstract: A manufacturing system for fabricating optical waveguides includes a diffusion channel with a plurality of inlets at a first end and an outlet at a second end opposite to the first end and separated from the inlets by a channel length. Each of the plurality of inlets includes a central inlet flowing a first resin into the diffusion channel such that the first resin flows along the channel length of the diffusion channel toward the outlet, and an outer inlet flowing a second resin along a periphery of the first resin. The second resin may have an index of refraction different than the first resin. The diffusion may occur between portions of the first resin and portions of the second resin over the channel length to form a composite resin having a profile with a plurality of indices of refraction in at least one dimension.

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