Invention Grant
- Patent Title: Semiconductor device and method of fabricating 3D package with short cycle time and high yield
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Application No.: US14971627Application Date: 2015-12-16
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Publication No.: US09941207B2Publication Date: 2018-04-10
- Inventor: Yaojian Lin
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L21/66 ; H01L21/768 ; H01L21/78 ; H01L23/31 ; H01L25/16 ; H01L25/00 ; H01L23/00 ; H01L23/498 ; H01L21/683 ; H01L21/56 ; H01L23/544

Abstract:
A method of making a semiconductor device comprising the steps of providing a first manufacturing line, providing a second manufacturing line, and forming a first redistribution interconnect structure using the first manufacturing line while forming a second redistribution interconnect structure using the second manufacturing line. The method further includes the steps of testing a first unit of the first redistribution interconnect structure to determine a first known good unit (KGU), disposing a known good semiconductor die (KGD) over the first KGU of the first redistribution interconnect structure, and dicing the first KGU and KGD from the first redistribution interconnect structure. The method further includes the steps of testing a unit of the second redistribution interconnect structure to determine a second KGU of the second redistribution interconnect structure and disposing first KGU of the first redistribution interconnect structure and the KGD over the second KGU of the second redistribution interconnect structure.
Public/Granted literature
- US20160118333A1 Semiconductor Device and Method of Fabricating 3D Package with Short Cycle Time and High Yield Public/Granted day:2016-04-28
Information query
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