- 专利标题: Semiconductor device and method of manufacturing same
-
申请号: US15180988申请日: 2016-06-13
-
公开(公告)号: US09941396B2公开(公告)日: 2018-04-10
- 发明人: Hitoshi Matsuura
- 申请人: RENESAS ELECTRONICS CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: RENESAS ELECTRONICS CORPORATION
- 当前专利权人: RENESAS ELECTRONICS CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2015-163357 20150821
- 主分类号: H01L29/739
- IPC分类号: H01L29/739 ; H01L29/10 ; H01L21/265 ; H01L29/06 ; H01L29/40 ; H01L29/66 ; H01L29/423 ; H01L29/08
摘要:
To achieve a semiconductor device equipped with a low ON voltage and high load short circuit withstand trench gate IGBT. A collector region on a back surface of a semiconductor substrate is comprised of a relatively lightly-doped P+ type first collector region and a relatively heavily-doped P++ type second collector region. The P++ type second collector region includes, in plan view, interfaces between a first trench having therein a first linear trench gate electrode and an N+ type emitter region formed on the side surface of the first trench and between a second trench having therein a second linear trench gate electrode and an N+ type emitter region formed on the side surface of the second trench. This enables electrons injected from the surface side of the semiconductor substrate to reach the P++ type second collector region and offset, with them, holes injected from the back surface side of the semiconductor substrate.
公开/授权文献
- US20170054010A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME 公开/授权日:2017-02-23
信息查询
IPC分类: